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MMAE 556 - Nano Manufacturing

Course Title: 

Nano Manufacturing

Course Description: 

This course covers the general methods used for micro- and nano-fabrication and assembly including photolithography techniques, physical and chemical deposition methods, masking, etching, and bulk micromachining as well as self-assembly techniques. It also covers nanotubes, nanowires, nanoparticles, and the devices that use them including both electronic and mechanical-electronic systems as well as nano-structural materials and composites. Focus is on commercially available current processes as well as emerging technologies and evolving research areas. Sensing and instrumentation as well as nano-positioning and actuation are covered briefly.